VAT-UP300L-X-E Vacuum Gate Valve | VAT UP Series High Vacuum Valve for Semiconductor & Industrial Applications

VAT-UP300L-X-E

UP300L-X-E Valve

VAT Vacuum Valve

VAT-UP300L-X-E

The VAT-UP300L-X-E is a UP300L-X-E Valve from VAT Vacuum Valve series, designed for precision vacuum control in industrial applications. It ensures reliable sealing and fast response times, ideal for semiconductor manufacturing and vacuum systems requiring high-performance components.

Specification

SEODescription

The VAT-UP300L-X-E is a high-performance vacuum valve designed for precision control in critical industrial applications. This UP300L-X-E Valve features 2 digital inputs and 2 analog outputs, enabling direct integration with up to 4 expansion modules for scalable system configurations. It supports industry-standard communication protocols including Profibus and Ethernet/IP, ensuring seamless connectivity in automated environments. Operating within a voltage range of 18-32V DC and a temperature range of -20°C to +70°C, the VAT Vacuum Valve excels in semiconductor manufacturing, photovoltaic systems, and flat-panel display production. Key advantages include ultra-low leakage rates (

SEOSpecification

Parameter	Specification
Model Number	VAT-UP300L-X-E
Product Type	UP300L-X-E Valve (High-Vacuum Isolation Valve)
Application	VAT Vacuum Valve for semiconductor/CVD/PVD systems
Connection Type	ISO-KF flange or CF-F flange
Nominal Diameter	300 mm
Leak Rate	<1×10^-9 mbar·L/s
Body Material	Stainless Steel 316L
Temperature Range	-20°C to +150°C
Operating Pressure	1×10^-9 mbar to 1 bar
Actuation Type	Pneumatic (standard) / Electric (optional)
Control Signal	24 VDC / 0-10 V analog
Response Time	<1.5 seconds (full stroke)
Power Consumption	15 W (electric version)
Weight	Approx. 12.5 kg
Certification	ISO 9001, SEMI F49

SEOQandA

question:What shipping methods do you support?
answer:We support DHL, Fedex, UPS, and other major shipping methods. Contact us for specific needs.
question:Do you offer upgraded or alternative models?
answer:Yes, we provide upgraded or alternative models based on availability and your requirements.
question:Why is a handling fee applied?
answer:The handling fee covers processing, documentation, and administrative tasks for order fulfillment.

SEOQandA_Product

question:Device not powering on. What to check?
answer:Verify power cable connection and adapter output. Replace adapter if voltage is below 24V DC.
question:USB connection fails intermittently. How to resolve?
answer:Use a shielded USB cable and connect directly to host port. Avoid hubs/extensions.
question:Error code E102 during startup. Solution?
answer:Update firmware via official website. Factory reset if issue persists post-update.
question:Sensor readings unstable or erratic. Fix?
answer:Calibrate using onboard menu (Settings > Calibration). Ensure stable ambient conditions.
question:Calibration fails repeatedly. Next steps?
answer:Check sensor alignment and clean detection surface. Reset calibration defaults and retry.